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Welcome to the Homepage of
Georgetown Advanced Electronics Laboratory's Micro-fabrication
Laboratory.
Our 2,000 sq. ft. clean room facility, located
in Reiss Science Hall , is open to
industry and academic users for MEMS micromachining
processing, including:
- Thin Film Deposition: Evaporation, Sputtering, LPCVD, PECVD,
Spinning, Casting
- Photolithography: Contact
Lithography for line-widths down to 0.75 µm over 75mm
diameters
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Positive
Novolak, Polyimide and PMMA: Negative Butyl and Epoxies
- Wet Chemical Etching: Isotropic, Anisotropic,
and Selective Etching
- Plasma
Reactive Ion Etching
- Thermal Processing: Oxidation, Solid
Source Doping, Annealing, Curing
- Characterization and
Testing:
Critical thin film metrology
tools, Probing, Packaging, Fixturing
Lab clients can run their own processes in the
lab on our equipment, or contract with the Lab to perform
processing on a foundry basis. For an overview of the
GAEL Micro-fabrication Lab, check our mission
and capabilities.
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