SiC films 0.2-2.0 mum thick have been characterized structurally by X-ray diffraction techniques. The films were deposited by electron cyclotron resonance-chemical vapor deposition techniques. No evidence of crystallinity was observed for films with thicknesses less than 1 mum; these are presumed to be amorphous. Thicker films were found to have crystallized predominantly in the a phase of SiC.