E--BEAM DEPOSITION OF TETRAGONAL ZRO2 FILMS STABILIZED WITH ALUMINA AND SCANDIA

TitleE--BEAM DEPOSITION OF TETRAGONAL ZRO2 FILMS STABILIZED WITH ALUMINA AND SCANDIA
Publication TypeConference Proceedings
Year of Publication1989
AuthorsQadri, S. B., Skelton E. F., Harford M., Lubitz P., and Aprigliano L.
Conference Name36th National Symp of the American Vacuum Soc
Pagination2344-2346
Conference LocationBoston, Ma
ISBN Number0734-2101