ELECTRON-BEAM DEPOSITION OF ZRO2-SNO2 FILMS

TitleELECTRON-BEAM DEPOSITION OF ZRO2-SNO2 FILMS
Publication TypeJournal Article
Year of Publication1994
AuthorsQadri, S. B., Skelton E. F., Harford M. Z., Kim C., and Lubitz P.
JournalSurface & Coatings Technology
Volume63
Pagination155-157
Abstract

Films of ZrO2-SnO2 were deposited by simultaneous electron beam evaporation of the two oxides. Films deposited on substrates at room temperature were amorphous whereas at a substrate temperature of 300-degrees-C they were crystalline. Films with less than 3 wt.% SnO2 nucleated in mixed phases of monoclinic and cubic ZrO2. Films with more than 3 wt.% SnO2 showed the cubic phase of the zirconia. These films will have potential applications in engine technology and other high temperature applications.