STRUCTURAL STABILITY OF ZRO2-AL2O3 THIN-FILMS DEPOSITED BY MAGNETRON SPUTTERING

TitleSTRUCTURAL STABILITY OF ZRO2-AL2O3 THIN-FILMS DEPOSITED BY MAGNETRON SPUTTERING
Publication TypeJournal Article
Year of Publication1989
AuthorsQadri, S. B., Gilmore C. M., Quinn C., Skelton E. F., and Gossett C. R.
JournalJournal of Vacuum Science & Technology a-Vacuum Surfaces and Films
Volume7
Pagination1220-1224