STABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS
| Title | STABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS |
| Publication Type | Journal Article |
| Year of Publication | 1987 |
| Authors | Gilmore, C. M., Quinn C., Qadri S. B., Gossett C. R., and Skelton E. F. |
| Journal | Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films |
| Volume | 5 |
| Pagination | 2085-2087 |