STABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS

TitleSTABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS
Publication TypeJournal Article
Year of Publication1987
AuthorsGilmore, C. M., Quinn C., Qadri S. B., Gossett C. R., and Skelton E. F.
JournalJournal of Vacuum Science & Technology a-Vacuum Surfaces and Films
Volume5
Pagination2085-2087