ETCHING OF INP BY H3PO4, H2O2 SOLUTIONS

TitleETCHING OF INP BY H3PO4, H2O2 SOLUTIONS
Publication TypeJournal Article
Year of Publication1990
AuthorsMouton, A., Sundararaman C. S., Lafontaine H., Poulin S., and Currie J. F.
JournalJapanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
Volume29
Pagination1912-1913