CF4-AR REACTIVE ION ETCHING OF GALLIUM-ARSENIDE
| Title | CF4-AR REACTIVE ION ETCHING OF GALLIUM-ARSENIDE |
| Publication Type | Journal Article |
| Year of Publication | 1989 |
| Authors | Lussier, P., Belanger M., Meunier M., and Currie J. F. |
| Journal | Canadian Journal of Physics |
| Volume | 67 |
| Pagination | 259-261 |