A SURFACE ANALYTICAL STUDY OF GAAS(100) CLEANING PROCEDURES

TitleA SURFACE ANALYTICAL STUDY OF GAAS(100) CLEANING PROCEDURES
Publication TypeJournal Article
Year of Publication1989
AuthorsLu, Z. H., Lagarde C., Sacher E., Currie J. F., and Yelon A.
JournalJournal of Vacuum Science & Technology a-Vacuum Surfaces and Films
Volume7
Pagination646-650