Laser patterning of thin-film electrochemical gas sensors
|Title||Laser patterning of thin-film electrochemical gas sensors|
|Publication Type||Conference Proceedings|
|Year of Publication||1995|
|Authors||Lecours, A., Caron M., Ciureanu P., Turcotte G., Ivanov D., Yelon A., and Currie J. F.|
|Conference Name||3rd International Conference on Laser Ablation (COLA 95)|
|Conference Location||Strasbourg, France|
We have patterned a CO2 thin film electrochemical sensor using Xe laser ablation of Pt, Nasicon and Na2CO3 thin films. A thin metallic absorbing layer on Nasicon is used to achieve reproducible ablation of the ionic conductor with no piercing of the buried Pt electrode. Processing conditions are 10 J/cm(2) pulses with a scanning velocity of 500 mu m/s for Pt and 6.3 J/cm(2) pulses with a scanning velocity of 100 mu m/s for Nasicon. Nasicon is ablated in the form of flakes suggesting an ablation in the solid phase. Fabrication of an integrated heating element and a micro-thermometer by laser ablation is also presented.