Laser patterning of thin-film electrochemical gas sensors
| Title | Laser patterning of thin-film electrochemical gas sensors |
| Publication Type | Conference Proceedings |
| Year of Publication | 1995 |
| Authors | Lecours, A., Caron M., Ciureanu P., Turcotte G., Ivanov D., Yelon A., and Currie J. F. |
| Conference Name | 3rd International Conference on Laser Ablation (COLA 95) |
| Pagination | 341-346 |
| Conference Location | Strasbourg, France |
| Abstract | We have patterned a CO2 thin film electrochemical sensor using Xe laser ablation of Pt, Nasicon and Na2CO3 thin films. A thin metallic absorbing layer on Nasicon is used to achieve reproducible ablation of the ionic conductor with no piercing of the buried Pt electrode. Processing conditions are 10 J/cm(2) pulses with a scanning velocity of 500 mu m/s for Pt and 6.3 J/cm(2) pulses with a scanning velocity of 100 mu m/s for Nasicon. Nasicon is ablated in the form of flakes suggesting an ablation in the solid phase. Fabrication of an integrated heating element and a micro-thermometer by laser ablation is also presented. |