FABRICATION OF HIGH-QUALITY NB/AL/ALOX/NB STACKED JOSEPHSON-JUNCTIONS
| Title | FABRICATION OF HIGH-QUALITY NB/AL/ALOX/NB STACKED JOSEPHSON-JUNCTIONS |
| Publication Type | Conference Proceedings |
| Year of Publication | 1993 |
| Authors | Barbara, P., and Costabile G. |
| Conference Name | 20th International Conference on Low Temperature Physics |
| Pagination | 69-70 |
| Conference Location | Eugene, Or |
| Abstract | We have fabricated stacked Josephson junctions from a double trilayer structure deposited sequentially with the intermediate Nb layer slightly thicker than lambda(L). The lower electrode geometry was patterned by a sequence of Reactive Ion Etching and sputter-etching operations, while the junctions were defined by anodic oxidation of the top and the intermediate electrodes. We measured from the I-V characteristic the quasiparticle losses, finding V(m) congruent-to 65 mV. Moreover we found that the critical currents in the two junctions of each stack are similar within less than ten percent and the magnetic field patterns are very regular. |