Fabrication Tools

  • Class 100 Lithography room
  • Class 1000 Cleanroom
  • Controlled gas ambient quartz tube furnaces: Lindberg, Thermtek
  • 3 Stack oxidation furnace
  • High Vacuum Magnetron Sputterer: CVC AST-601
  • High Ultra high vacuum sputtering system (Orion-8-UHV, AJA International)
  • Leak Detector, Three-mass: Pfeiffer QualyTest
  • Photo mask aligning & exposure: Karl Suss MJB-3
  • Plasma Enhanced Chemical Vapor Deposition (PECVD): Plasmalab DP80
  • Reactive Ion Etching (RIE): Plasmalab mP RIE
  • Resist Spinner, microprocessor controlled: Headway Research PWM32
  • Silicon Micro-machining, Chemical Etching
  • Soft and Hard-bake resist ovens: Blue M Stabil-Therm
  • Ultrasonic/thermo compaction wire bonder: Hybond 572A Wedge Bonder
  • Wet benches with fume extraction: Microvoid