Welcome to GNuLab!
The Georgetown Nanoscience and Microtechnology Laboratory (GNuLab) is a shared use facility open to researchers in the Georgetown University Main Campus and Medical Center, as well as to external researchers. This 1,900 square foot clean room is located in the Department of Physics and includes state-of-the-art instrumentation for fabrication and characterization of materials and electronic devices. Users are assisted and trained in their operations by Dr. Nijdam. We encourage all potential users to browse through this website to check the list of instruments available. If you are interested in using this facility, please contact the GNuLab director.
This page is continuously updated when new instrumentation or processes become available.
- Potentiostat-galvanostat: Perkin Elmer Parstat 2263
- Scanning Electron Microscope: Zeiss SUPRA55-VP
- Stylus Film Thickness Profilometer: Dektak 3030
- Thin Film Measurement/high mag. optical microscope: Lietz Ergolux/Filmetrics F40
- Thin Film Stress Tester, ambient-950°C: SMSI 8900 TC (Reiss 112)
- Wentworth Probe Station with Video Capture (Reiss 112)
- Class 100 Lithography room
- Class 1000 Cleanroom
- Controlled gas ambient quartz tube furnaces: Lindberg, Thermtek
- 3 Stack oxidation furnace
- High Vacuum Magnetron Sputterer: CVC AST-601
- High Ultra high vacuum sputtering system (Orion-8-UHV, AJA International)
- Leak Detector, Three-mass: Pfeiffer QualyTest
- Photo mask aligning & exposure: Karl Suss MJB-3
- Plasma Enhanced Chemical Vapor Deposition (PECVD): Plasmalab DP80
- Reactive Ion Etching (RIE): Plasmalab mP RIE
- Resist Spinner, microprocessor controlled: Headway Research PWM32
- Silicon Micro-machining, Chemical Etching
- Soft and Hard-bake resist ovens: Blue M Stabil-Therm
- Ultrasonic/thermo compaction wire bonder: Hybond 572A Wedge Bonder
- Wet benches with fume extraction: Microvoid
External Users: $60/hour unless otherwise noted. This fee includes parking and use of basic glassware. Please contact GNuLab director to check availability of chemicals you need for your processes.
Georgetown University Users: Check information in the blackboard website for internal fees.
Note for all users:
- additional surcharge for precious metals deposition (gold, platinum, silver)
- additional surcharge for DRIE gases (SF6, Halocarbon 318)
- Next scheduled chemical safety training session: Wednesday, June 2, 2010, at 11:00 AM in Reiss 502.
- NEW Oxford INCAEnergy/EBSD installed!! Potential Users: Check out this workshop co-organized by Oxford Inst. in DC on June 3, 2010.
Clean Room Rules
- All users should be familiar with the clean room etiquette and safety procedures and are required to download and read this document.
- All users are required to attend the chemical safety course.
- GU users are required to bring their own supplies. You can find a detailed list here.
For equipment availability and reservations, link to our electronic calendar.
Any scheduled maintenance or problems with instrumentation that will prevent its use will be recorded in the note section of the calendar.
GNuLab PIs - meeting schedule
All GNuLab PIs are invited to GNuLab monthly meetings!
Please check our meeting schedule and click on the date to find out about the meeting agenda.
Minutes from previous meetings can be found in the GNuLab meeting folder, within "Documents" in the blackboard website.
e-mail: gnulab [at] physics [dot] georgetown [dot] edu
172 Reiss Science Building
Telephone: (202) 687-5521
E-mail: nijdam [at] physics [dot] georgetown [dot] edu
We are located in:
172 Reiss Science Building
37th and O Streets, N.W.
Washington, DC 20057
see GU map to find us!